Browsing Journal Articles by Author "Uda, Hashim"
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Alignment mark architecture effect on alignment signal behavior in advanced lithography
Normah, Ahmad; Uda, Hashim; Mohd Jeffrey, Manaf; Kader Ibrahim, Abdul Wahab (Institute of Electrical and Electronics Engineering (IEEE), 2006)The downscaling of CMOS technology becomes a challenge to the scanner alignment system since overlay and alignment accuracy becomes tighter. Such a tight overlay requirement requires a very stable alignment performance. A ... -
Assessing Antimicrobial Activity of Aloe Vera against Colletrotrichum Capsici and Bacillus Subtilis
Muhammad Nur Aiman, Uda; Ong, Yee Fen; Tan, Ewe Shen; Nur Hulwani, Ibrahim; N. Harzana, Shaari; N. Shamiera, Said; Mohd Khairul Rabani, Hashim; Muhammad Syakir, Yusoff; Uda, Hashim; Gopinath, Subash C. B. (Universiti Malaysia Perlis (UniMAP), 2018)Nowadays, overuse of chemical fungicide has a side effect which is harmful to human, cause environmental problem and destroys the antagonist microorganisms. Therefore, it is important to develop natural fungicide and ... -
Biotechnological processes in microbial Amylase production
Subash C. B., Gopinath; Periasamy, Anbu; Mohd Khairuddin, Md Arshad; Thangavel, Lakshmipriya; Chun, Hong Voon; Uda, Hashim; Suresh V., Chinni (Hindawi Limited, 2017-02-09)Amylase is an important and indispensable enzyme that plays a pivotal role in the field of biotechnology. It is produced mainly from microbial sources and is used in many industries. Industrial sectors with top-down and ... -
Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology
Uda, Hashim; Ramzan, Mat Ayub; Nik Hazura, Nik Hamat (Universiti Kebangsaan Malaysia, 2007)This paper involves the planarization of borophosphosilicate glass (BPSG) film using a new recipe for annealing process to improve the borophosphosilicate glass (BPSG) film flatness after reflow. This improvement is for ... -
Characteristics of Serial Peripheral Interfaces (SPI) timing parameters for optical mouse sensor
Mohd Khairuddin, Md Arshad; Uda, Hashim; Choo, C.M. (Institute of Electrical and Electronics Engineering (IEEE), 2006)In this paper we report the characterizations results of Serial Peripheral Interface (SPI) timing parameters for optical mouse sensor. SPI is an interface that facilitates the transfer of synchronous serial data. It supports ... -
Characterization of intermetallic growth of gold ball bonds on aluminum bond pads
Mohd Khairuddin, Md Arshad; Lim, Moy Fung; Mohammad Nuzaihan Md. Noor; Uda, Hashim (University of Malaya, 2008)In this paper the intermetallic growth between gold ball bond and aluminum bond pad are studied. It involves thermal aging at 150 °C and 200 °C for various time intervals. The relationship between electrical resistance and ... -
The characterization of power supply noise for optical mouse sensor
Mohd Khairuddin, Md Arshad; Uda, Hashim; Ming, Choo Chew (Institute of Electrical and Electronics Engineering (IEEE), 2006)The induced power supply noise (sinusoidal waveform) that injected to Vdd pin will cause unwanted spike at the positive amplitude and negative amplitude to the DC input voltage. At certain limit this spike will cause the ... -
Characterization of robust alignment mark to improve alignment performance
Normah, Ahmad; Uda, Hashim; Mohd Jefrey, Manaf; Kader, Ibrahim (Institute of Electrical and Electronics Engineering (IEEE), 2006)Overlay requirement is one of the biggest obstacles in achieving a very small feature. With the continued growth of small feature size, overlay requirement becomes tighter. Such a tight requirement requires a very high ... -
Design of 100nm single-electron transistor (SET) by 2D TCAD simulation
Amiza, Rasmi; Uda, Hashim; Awang Mat, Abd F (Institute of Electrical and Electronics Engineering (IEEE), 2006)One of the great problems in current large-scale integrated circuits (LSIs) is increasing power dissipation in a small silicon chip. Single-electron transistor (SET) which operate by means of one-by-one electron transfer, ... -
Designing of masks for quantum dot single electron transistor fabrication using E-beam nanolithography
Uda, Hashim; Sutikno, Madnasri; Zul Azhar, Zahid Jamal (Nano Science and Technology Institute, 2007)Quantum dot single electron transistor (QD SET) is able to be fabricated through a joint technique of e-beam lithography (EBL), pattern dependent oxidation (PADOX) and high density plasma etching. In this research, we have ... -
Effect of alignment mark architecture on alignment signal behavior in advanced lithography
Normah, Ahmad; Uda, Hashim; Mohd Jeffery, Manaf; Kader Ibrahim, Abdul Wahab (Universiti Malaya, 2007)Alignment mark architecture is divided into two types, which depending on where the mark is defined. Alignment mark that is defined through the contact masking steps is known as contact mark and alignment mark that is ... -
Effect of alignment mark depth on alignment signal behavior in advanced lithography
Normah, Ahmad; Uda, Hashim; Mohd Jeffery, Manaf; Kader Ibrahim, Abdul Wahab (Universiti Malaysia Perlis, 2008)Finding a robust alignment strategy is one of the key evaluations in defining photolithography process. Alignment is a process to determine how the current pattern is placed on the wafer. Alignment is done by an optical ... -
The effects of multiple zincation process on Aluminum Bond Pad surface for Electroless Nickel Immersion Gold deposition
Mohd Khairuddin, Md Arshad; Ibrahim, Ahmad; Azman, Jalar; Ghazali, Omar; Uda, Hashim (American Society of Mechanical Engineers (ASME), 2006-09)This paper reports the effects of a multiple zincation processon the Al bond pad surface prior to electroless nickel immersion gold deposition. The study of multiple zincation comprises the surface topogtaphy and morphology ... -
An estimation of the energy and exergy efficiencies for the energy resources consumption in the transportation sector in Malaysia
Saidur, R.; Munavvar, Abdul Sattar; Masjuki, H. H.; Ahmed, S.; Uda, Hashim (Elsevier Ltd., 2007-08)The purpose of this work is to apply the useful energy and exergy analysis models for different modes of transport in Malaysia and to compare the result with a few countries. In this paper, energy and exergy efficiencies ... -
Fabrication and characterization of Si quantum dots and SiO2 tunnel barriers grown by a controlled oxidation process
Sutikno, Madnasri; Uda, Hashim; Zul Azhar, Zahid Jamal (IOP Publishing Ltd, 2008-01-29)The control of the growth of silicon dioxide (SiO2) and the formation of quantum dots (QDs) play an important role in the fabrication of single-electron transistors (SETs). In this work, SET structures were fabricated using ... -
Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices
Thikra, S. Dhahi; Uda, Hashim; Md. Eaqub, Ali; Nazwa, Taib (Universiti Kebangsaan Malaysia, 2011-11-18)We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable ... -
Nano patterning of cone dots and nano constrictions of negative e-beam resist for single electron transistor fabrication
Sutikno, Madnasri; Uda, Hashim; Zul Azhar, Zahid Jamal (Springer New York, 2007-12)We present an optimization of nano dot of negative tone e-beam resist which is a very important step in single electron transistor fabrication process. The optimum design of dot and nano constriction plays a significant ... -
Nano-silver microcavity enhanced UV GaN light emitter
Naser Mahmoud, Ahmed; Zaliman, Sauli; Uda, Hashim; Zul Azhar, Zahid Jamal (Inderscience Enterprises Limited, 2009)We report results of measurements that help to clarify the role of silver in the reflection of UV emission light from GaN. A GaN as an active layer was sandwiched between two silver metal reflectors. GaN layer on sapphire ... -
Nanogap Dielectric Biosensor for label free DNA Hybridization detection
Uda, Hashim; Muhamad Emi Azri, Shohini; Harbant, Singh (Universiti Malaysia Perlis, 2007)Sensors based on nanogap capacitance changes are being developed for genomic and proteomic applications because they offer label-free detection on platforms amenable to high throughput configurations. This paper presents ... -
Nanotechnology development in Malaysia: current status and implementation strategy
Uda, Hashim; Shahrir, Salleh; Elley Nadia, Elliazir (Universiti Malaysia Perlis, 2008)Nanotechnology development offers the promise of advances within and connections across many disciplines-biology, chemistry, physics, materials science and engineering. Determination of the critical success factors in ...