Azhari, A. W.; Eop, T. S.; Che Halin, D. S.; Sopian, K.; Hashim, U.; Zaidi, S. H. (Universiti Malaysia Perlis (UniMAP), 2022-10)
Polycrystalline SiGe thin films have been formed after thermal annealing of formerly vacuum evaporated a-Ge layers. The a-Ge thin films were deposited onto nanostructured Si substrates via low-cost thermal evaporation ...