Browsing School of Microelectronic Engineering (FYP) by Author "Zaharah Mohamed"
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Study of the effect of different Gases parameter in Dry Etching process on Etch Rate profile
Zaharah Mohamed (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)The principal focus of this project is dry etching technique by using the Inductively Couple Plasma-Reactive Ion Etching (ICP-RIE). An (ICP) system was chosen because of its high plasma density and low cost relative to ...