Browsing School of Microelectronic Engineering (FYP) by Author "Muhammad Afiq Abdul Aziz"
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The influence of the accelerating voltages on the growth of the square structure during Electron Beam Induced Deposition (EBID) method
Muhammad Afiq Abdul Aziz (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)Electron beam induced deposition (EBID) is a method for high-resolution direct material deposition from the gas phase in the Scanning Electron Microscopy (SEM) onto a substrate. In this project, EBID method has been used ...