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dc.contributor.authorYufridin, Wahab
dc.contributor.authorZayegh, Aladin
dc.contributor.authorBegg, Rezaul
dc.date.accessioned2010-11-25T08:26:03Z
dc.date.available2010-11-25T08:26:03Z
dc.date.issued2010-04-12
dc.identifier.citationp.232-235en_US
dc.identifier.isbn978-1-4244-6629-0
dc.identifier.urihttp://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5503069
dc.identifier.urihttp://dspace.unimap.edu.my/123456789/10309
dc.descriptionLink to publisher's homepage at http://ieeexplore.ieee.org/en_US
dc.description.abstractPressure sensing is one of the mostly performed measurement encompassing varieties of applications. The latest technology such as silicon based Micro-electromechanical Systems (MEMS) technology is favoured due to its competitive cost and proven performance. In our research, MEMS pressure sensor for biomedical application is investigated. There are a number of stages involved in our research for implementation of a MEMS pressure sensor which includes application review, conceptual design, modeling, simulation, tape-out, fabrication and characterization. A highly proven technology offered by Infineon Technologies SensorNor AS is used in this research and the requirements are discussed. Recently, the device is successfully implemented on silicon and our research is now entering the characterization stage. In this paper, the research work prior to fabrication, the fabrication result and the post foundry packaging tasks for full device characterization are discussed. Future works are also discussed in the final section.en_US
dc.language.isoenen_US
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en_US
dc.relation.ispartofseriesProceedings of the International Conference on Electronic Devices, Systems and Applications (ICEDSA) 2010en_US
dc.subjectPressure sensoren_US
dc.subjectFabricationen_US
dc.subjectMEMSen_US
dc.titleSilicon implementation of micro pressure sensoren_US
dc.typeWorking Paperen_US
dc.contributor.urlyufridin@unimap.edu.myen_US
dc.contributor.urlaladin.zayegh@vu.edu.auen_US
dc.contributor.urlrezaul.begg@vu.edu.auen_US


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