Now showing items 1-20 of 62

    • Alignment mark architecture effect on alignment signal behavior in advanced lithography 

      Normah, Ahmad; Uda, Hashim; Mohd Jeffrey, Manaf; Kader Ibrahim, Abdul Wahab (Institute of Electrical and Electronics Engineering (IEEE), 2006)
      The downscaling of CMOS technology becomes a challenge to the scanner alignment system since overlay and alignment accuracy becomes tighter. Such a tight overlay requirement requires a very stable alignment performance. A ...
    • Amino-propyltriethoxysilane Modified Heavy Metal Sensor Based on Silicon Nanowire Arrays 

      Nuri A.KH., Ehfaed; Shillan, Bathmanathan; Tijjani, Adam; Mohammed, Mohammed; Aeshah M., Mohammed; Omar S., Dahham; Uda, Hashim; Nik Noriman, Zulkepli (IOP Publishing, 2018)
      Safety of consuming water from various resources can be questioned nowadays due to high content of material that is highly possible to have toxic content and cause permanent damage to human itself. Possible toxic content ...
    • Arsenic ion Detection via Electron Chemical Reaction Mechanism Based on Interdigitated Electrode (IDE) 

      Mosbah, Ammar B.; Tijjani, Adam; Mohammed, Mohammed; Omar S., Dahham; Uda, Hashim; Nik Noriman, Zulkepli (IOP Publishing, 2018)
      In recent days, both raw and treated water being consumed by human and animal posed serious threat to the consumer. Due to heavy industrialization water easily carries heavy metals that are harmful to consumers. Heavy metal ...
    • Assessing Antimicrobial Activity of Aloe Vera against Colletrotrichum Capsici and Bacillus Subtilis 

      Muhammad Nur Aiman, Uda; Ong, Yee Fen; Tan, Ewe Shen; Nur Hulwani, Ibrahim; N. Harzana, Shaari; N. Shamiera, Said; Mohd Khairul Rabani, Hashim; Muhammad Syakir, Yusoff; Uda, Hashim; Gopinath, Subash C. B. (Universiti Malaysia Perlis (UniMAP), 2018)
      Nowadays, overuse of chemical fungicide has a side effect which is harmful to human, cause environmental problem and destroys the antagonist microorganisms. Therefore, it is important to develop natural fungicide and ...
    • Biotechnological processes in microbial Amylase production 

      Subash C. B., Gopinath; Periasamy, Anbu; Mohd Khairuddin, Md Arshad; Thangavel, Lakshmipriya; Chun, Hong Voon; Uda, Hashim; Suresh V., Chinni (Hindawi Limited, 2017-02-09)
      Amylase is an important and indispensable enzyme that plays a pivotal role in the field of biotechnology. It is produced mainly from microbial sources and is used in many industries. Industrial sectors with top-down and ...
    • Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology 

      Uda, Hashim; Ramzan, Mat Ayub; Nik Hazura, Nik Hamat (Universiti Kebangsaan Malaysia, 2007)
      This paper involves the planarization of borophosphosilicate glass (BPSG) film using a new recipe for annealing process to improve the borophosphosilicate glass (BPSG) film flatness after reflow. This improvement is for ...
    • Characteristics of Serial Peripheral Interfaces (SPI) timing parameters for optical mouse sensor 

      Mohd Khairuddin, Md Arshad; Uda, Hashim; Choo, C.M. (Institute of Electrical and Electronics Engineering (IEEE), 2006)
      In this paper we report the characterizations results of Serial Peripheral Interface (SPI) timing parameters for optical mouse sensor. SPI is an interface that facilitates the transfer of synchronous serial data. It supports ...
    • Characterization of intermetallic growth of gold ball bonds on aluminum bond pads 

      Mohd Khairuddin, Md Arshad; Lim, Moy Fung; Mohammad Nuzaihan Md. Noor; Uda, Hashim (University of Malaya, 2008)
      In this paper the intermetallic growth between gold ball bond and aluminum bond pad are studied. It involves thermal aging at 150 °C and 200 °C for various time intervals. The relationship between electrical resistance and ...
    • The characterization of power supply noise for optical mouse sensor 

      Mohd Khairuddin, Md Arshad; Uda, Hashim; Ming, Choo Chew (Institute of Electrical and Electronics Engineering (IEEE), 2006)
      The induced power supply noise (sinusoidal waveform) that injected to Vdd pin will cause unwanted spike at the positive amplitude and negative amplitude to the DC input voltage. At certain limit this spike will cause the ...
    • Characterization of robust alignment mark to improve alignment performance 

      Normah, Ahmad; Uda, Hashim; Mohd Jefrey, Manaf; Kader, Ibrahim (Institute of Electrical and Electronics Engineering (IEEE), 2006)
      Overlay requirement is one of the biggest obstacles in achieving a very small feature. With the continued growth of small feature size, overlay requirement becomes tighter. Such a tight requirement requires a very high ...
    • Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering undergraduate 

      Uda, Hashim; Zul Azhar, Zahid Jamal; Mohammad Nuzaihan, Md Nor; Nur Hamidah, Abdul Halim (Kolej Universiti Kejuruteraan Utara Malaysia, 2005)
      The Negative Plenum Cleanroom which is design and built by KUKUM is primarily used for the teaching of the undergraduate microelectronic course. The cleanroom is approximately 115m² in size. The level of cleanliness in the ...
    • Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates 

      Mohd Zainizan, Sahdan; Uda, Hashim; Hashim, Saim; Marlia, Morsin (Kolej Universiti Kejuruteraan Utara Malaysia, 2005-05-18)
      In teaching undergraduates program in MOSFET fabrication, mask set is one of the major problem since the cost is extensively high. The purpose of these masks is to define certain region on a wafer. In this work, a low ...
    • Design and fabrication of Nanowire-based conductance biosensor using spacer patterning technique 

      Uda, Hashim; Shahrir, Salleh; Siti Fatimah, Abd Rahman; Amir Razif Arief, Jamil Abdullah (Institute of Electrical and Electronics Engineering (IEEE), 2008-12-01)
      Materials have different behaviours and properties at the nanoscales (1-100nm). New theories and discoveries have been found in designing and fabricating at these sizes. Silicon Nanowires has allowed the introduction of ...
    • Design and fabrication of quantum dot single electron transistor structure using e-beam nanolithography 

      Uda, Hashim; Sutikno, Madnasri; Zul Azhar, Zahid Jamal (Universiti Malaysia Perlis, 2011)
      Quantum dot single electron transistor (QD SET) is fabricated using e-beam nanolithography (EBL) and is continued with the combination process of pattern dependent oxidation (PADOX) and high density plasma etching. EBL was ...
    • Design and process development of silicon nanowire based DNA biosensor using electron beam lithography 

      Uda, Hashim; Siti Fatimah, Abd Rahman; Mohammad Nuzaihan, Md Nor; Shahrir, Salleh (Institute of Electrical and Electronics Engineering (IEEE), 2008-12-01)
      Silicon nanowires (SiNWs) have their unique feature such as similar diameters to biomolecules, chemically tailorable physical properties, enable to apply in biomolecule detection and can be fabricated as a high performance ...
    • Design of 100nm single-electron transistor (SET) by 2D TCAD simulation 

      Amiza, Rasmi; Uda, Hashim; Awang Mat, Abd F (Institute of Electrical and Electronics Engineering (IEEE), 2006)
      One of the great problems in current large-scale integrated circuits (LSIs) is increasing power dissipation in a small silicon chip. Single-electron transistor (SET) which operate by means of one-by-one electron transfer, ...
    • Design, Fabrication and Characterization of silicon Nanostructures for Lead (Pb+ ) ion detection 

      Nuri A.KH., Ehfaed; Tijjani, Adam; Mohammed, Mohammed; Omar S., Dahham; Uda, Hashim; Nik Noriman, Zulkepli; Almahdi R., Rabia (IOP Publishing, 2018)
      Silicon nanostructure were prepared using cheap and in-house technique developed in INEE. Amino-functionalized Si nanowires were tested against heavy metal lead (Pb). The device was fabricated via dry oxide etching approach ...
    • Designing of masks for quantum dot single electron transistor fabrication using E-beam nanolithography 

      Uda, Hashim; Sutikno, Madnasri; Zul Azhar, Zahid Jamal (Nano Science and Technology Institute, 2007)
      Quantum dot single electron transistor (QD SET) is able to be fabricated through a joint technique of e-beam lithography (EBL), pattern dependent oxidation (PADOX) and high density plasma etching. In this research, we have ...
    • Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities 

      Marlia, Morsin; Nur Hamidah, Abdul Halim; Uda, Hashim; Hashim, Saim (Kolej Universiti Kejuruteraan Utara Malaysia, 2005-05-18)
      This paper presents the module development of inhouse MOS transistor device at KUKUM Micro Fabrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four ...
    • Effect of alignment mark architecture on alignment signal behavior in advanced lithography 

      Normah, Ahmad; Uda, Hashim; Mohd Jeffery, Manaf; Kader Ibrahim, Abdul Wahab (Universiti Malaya, 2007)
      Alignment mark architecture is divided into two types, which depending on where the mark is defined. Alignment mark that is defined through the contact masking steps is known as contact mark and alignment mark that is ...