Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering undergraduate

Abstract

The Negative Plenum Cleanroom which is design and built by KUKUM is primarily used for the teaching of the undergraduate microelectronic course. The cleanroom is approximately 115m² in size. The level of cleanliness in the cleanroom ranges from ISO Class 5 (Yellow Room) to ISO Class 8 (Grey Area/Utility Chase). The cleanroom is constructed with a negative plenum to house the fan filter units, which make it different from other commercially available cleanrooms. With negative plenum, maintenance work cost will be reduced and make the cleanroom life longer. The main intention of this project is to expose and teach students to appreciate the stringent cleanroom protocols, health and safety requirement in addition to the formal course works.