Browsing by Author "Shaffie Husin"
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Fabrication Of 50 µm transistor and AlNiAu interconnection process
Shaffie Husin (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-03)Generally process fabrication transistor will starts by cleaning the wafer, formation region drain, D and source, S, get oxide and deposited aluminum as contact with the source, drain and gate. Mask is very important thing ...