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    • Fabrication Of 50 µm transistor and AlNiAu interconnection process 

      Shaffie Husin (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-03)
      Generally process fabrication transistor will starts by cleaning the wafer, formation region drain, D and source, S, get oxide and deposited aluminum as contact with the source, drain and gate. Mask is very important thing ...