EIS Capacitor

Abstract

Electrolyte-Insulator-Semiconductor (EIS) capacitor is used to evaluate pH sensitivity of tin oxide thin films. Silicon dioxide (SiO2) was first used as pH-sensitive dielectric for ISFET. Currently, there have several types of materials that suitable to fabricate the pH sensor diode such as Al2O3, Si3N4 and Ta2O5. These materials have higher pH response.