Development of MEMS Manifold Absolute Pressure Sensor (MAPs) Prototype

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Date
2007-08-10
Author
Zaliman, Sauli, Assoc. Prof.
Hasnizah, Aris
Johari, Adnan, Assoc. Prof. Dr.
Poopalan, Prabakaran, Assoc. Prof. Dr.
Ramzan, Mat Ayub
Rizalafande, Che Ismail
Sohiful Anuar, Zainol Murad
Azuwir, Md. Nor
Abu Hassan, Abdullah
Mohd. Hatta, Musa
Razaidi, Hussin
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Abstract
The pressure sensor is a monolithic absolute pressure transducer. The transducer utilizes as sensing element, which varies its output voltage when pressure is applied to surface micro-machined silicon diaphragm.
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http://dspace.unimap.edu.my/123456789/8198
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