Silicon Nanowires

Abstract

Silicon Nanowires is a new class of materials that have attracted attention and great research interest in the last few years because of their great potential applications in nanotechnology such as: - nanoelectronic engineering - nanomechanical engineering - biomedical engineering

Fabrication of Silicon Nanowires is one of the great challenges today. Conventional lithography methods are not capable to produce Nanowires and even with advance nanolithography sizes below 100nm may not easily be achieved. The goal of this project is to form and produce very small Silicon Nanowires using a Top Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Lithography (EBL) method.