Design and Fabrication of MEMS Heatuator for Automotive Device Applications

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Date
2006
Author
Zaliman, Sauli, Prof. Madya
Hasnizah, Aris
Razaidi, Hussin
Mohd Hafiz, Ismail
Rizalafande, Che Ismail
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Abstract
Heatuator is one kind of actuators that converts energy to appropriate actions. The device is typical thermal actuator capable of over 20 micronewtons of force, over 10 um of deflection, at an input electrical power of 25 mW (5v, 5mA).
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http://dspace.unimap.edu.my/123456789/8068
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