Design, simulation and characterization of Moly Permalloy based electromagnetic sensor
Loading...
Date
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
Universiti Malaysia Perlis (UniMAP)
Abstract
This paper shows the design, simulation and characterization of Moly Permalloy based
electromagnetic sensor in MEMS software. The dimension of the device is minimized to the
smallest that the software can be simulated to 1 μm. Several models have been simulated
which differs in thickness of the material layer and design of the layers. The models are simulated separately to get the desired results in term of current and magnetic induction.
Description
Access is limited to UniMAP community.