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| Investigation of plasma induced etch damage/changes in AlGaN/GaN HEMTs | 61 |
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| November 2023 | December 2023 | January 2024 | February 2024 | March 2024 | April 2024 | May 2024 | |
|---|---|---|---|---|---|---|---|
| Investigation of plasma induced etch damage/changes in AlGaN/GaN HEMTs | 0 | 4 | 8 | 0 | 0 | 3 | 2 |
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| Investigation of Plasma Induced Etch Damage.pdf | 17 |
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