Leak test method for diffusion pump: a case study of leak testing method for diffusion pump in real industry

Abstract

This project is related to a real industry case involving the Quality Assurance Department for UWC Holdings Sdn. Bhd. In this project the problems and proposal of solutions were presented to solve the problems that occurred in the leak testing at diffusion pump section. Leak testing has various method to perform the proposal of solution that were discussed in this paper is by using Outside-in Helium Spraying Method. The suitable improvement such as using helium as a tracer gas for the leak test also recommended in this study. The observation and interviewer with workers in that factory were conducted to find out the problems and to draft the solutions. The main purpose of this study is to make sure the leak test method suitable for diffusion pump with suitable flow rate. Besides that, it was observed that in order to maintain the quality of the diffusion pump, the overall cost including the maintenance cost were reduce for the leak test.