| dc.contributor.author | Zul Azhar, Zahid Jamal, Assoc. Prof. Dr. | |
| dc.contributor.author | Sanna, Taking | |
| dc.date.accessioned | 2009-07-08T08:36:36Z | |
| dc.date.available | 2009-07-08T08:36:36Z | |
| dc.date.issued | 2004-12-13 | |
| dc.identifier.citation | p.1-6 | en_US |
| dc.identifier.uri | http://dspace.unimap.edu.my/123456789/6362 | |
| dc.description | Organized by ELectron Microscopy Society of Malaysia (EMSM), 13th - 15th December 2004 at Palm Garden Hotel, Putrajaya. | en_US |
| dc.description.abstract | Failure analysis (FA) plays an important role in the development and manufacturing of integrated circuits. It provides necessary information for technology advancement and for corrective action to improve quality and
reliability. In this paper the commonly used techniques in integrated circuits failure analysis are discussed. The paper also describes the basic FA flow consists of fault localization, deprocessing, defect localisation and inspection characterisation. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | ELectron Microscopy Society of Malaysia (EMSM) | en_US |
| dc.relation.ispartofseries | 13th Scientific Conference ELectron Microscopy Society of Malaysia (EMSM) | en_US |
| dc.subject | Failure analysis | en_US |
| dc.subject | Integrated circuits | en_US |
| dc.subject | Microelectronics | en_US |
| dc.subject | Reliability (Engineering) | en_US |
| dc.title | Techniques in Integrated Circuit (IC) failure analysis | en_US |
| dc.type | Working Paper | en_US |
