Study of titanium dioxide thin film by sol-gel method

Abstract

Titanium dioxide (TiO2) thin films based interdigitated electrodes (IDEs) have been synthesized using sol-gel method with hydrochloric acid (HCl) as catalyst. The prepared TiO2 solution has been deposited onto silicon dioxide (SiO2) substrates via spin-coating technique. Film was annealed at 500 °C and aluminium (Al) IDEs have been fabricated. Finally the X-ray diffraction (XRD) shows high intensity of both anatase and rutile peaks exist on 10 nm TiO2 thin film. Average crystallite size of the nanoparticles is seen to be 25 nm. UvVisible spectroscopic (UvVis) technique was used for the transmittance spectra characterization of the sample.