| dc.contributor.author | Abdul Aziz, A. | |
| dc.contributor.author | Lim, C.O. | |
| dc.contributor.author | Hassan, Z. | |
| dc.contributor.author | Zul Azhar Zahid, Jamal | |
| dc.date.accessioned | 2013-12-23T08:31:13Z | |
| dc.date.available | 2013-12-23T08:31:13Z | |
| dc.date.issued | 2005-12-31 | |
| dc.identifier.citation | Abdul Aziz, A., Lim, C.O., Hassan, Z., Jamal, Z. CoSi2 formation with a thin | en_US |
| dc.identifier.uri | http://dspace.unimap.edu.my/123456789/30798 | |
| dc.description.abstract | Not Available | en_US |
| dc.description.sponsorship | School of Microelectronic Engineering | en_US |
| dc.language.iso | en | en_US |
| dc.relation.ispartofseries | Recent Advances in Multidisciplinary Applied Physics;2005 | |
| dc.subject | Titanium | en_US |
| dc.title | CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer | en_US |
| dc.type | Book chapter | en_US |
| dc.publisher.department | School of Microelectronic Engineering | en_US |
