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Now showing items 11-16 of 16
Characterization of robust alignment mark to improve alignment performance
(Institute of Electrical and Electronics Engineering (IEEE), 2006)
Overlay requirement is one of the biggest obstacles in achieving a very small feature. With the continued growth of small feature size, overlay requirement becomes tighter. Such a tight requirement requires a very high ...
Characterization of intermetallic growth of gold ball bonds on aluminum bond pads
(University of Malaya, 2008)
In this paper the intermetallic growth between gold ball bond and aluminum bond pad are studied. It involves thermal aging at 150 °C and 200 °C for various time intervals. The relationship between electrical resistance and ...
Characteristics of Serial Peripheral Interfaces (SPI) timing parameters for optical mouse sensor
(Institute of Electrical and Electronics Engineering (IEEE), 2006)
In this paper we report the characterizations results of Serial Peripheral Interface (SPI) timing parameters for optical mouse sensor. SPI is an interface that facilitates the transfer of synchronous serial data. It supports ...
Nano-silver microcavity enhanced UV GaN light emitter
(Inderscience Enterprises Limited, 2009)
We report results of measurements that help to clarify the role of silver in the reflection of UV emission light from GaN. A GaN as an active layer was sandwiched between two silver metal reflectors. GaN layer on sapphire ...
Design of 100nm single-electron transistor (SET) by 2D TCAD simulation
(Institute of Electrical and Electronics Engineering (IEEE), 2006)
One of the great problems in current large-scale integrated circuits (LSIs) is increasing power dissipation in a small silicon chip. Single-electron transistor (SET) which operate by means of one-by-one electron transfer, ...
Alignment mark architecture effect on alignment signal behavior in advanced lithography
(Institute of Electrical and Electronics Engineering (IEEE), 2006)
The downscaling of CMOS technology becomes a challenge to the scanner alignment system since overlay and alignment accuracy becomes tighter. Such a tight overlay requirement requires a very stable alignment performance. A ...