Browsing School of Microelectronic Engineering (Articles) by Subject "Metal mark"
Now showing items 1-1 of 1
-
Effect of alignment mark architecture on alignment signal behavior in advanced lithography
(Universiti Malaya, 2007)Alignment mark architecture is divided into two types, which depending on where the mark is defined. Alignment mark that is defined through the contact masking steps is known as contact mark and alignment mark that is ...