Browsing School of Microelectronic Engineering (Articles) by Author "Ramzan, Mat Ayub"

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    • Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology 

      Uda, Hashim; Ramzan, Mat Ayub; Nik Hazura, Nik Hamat (Universiti Kebangsaan Malaysia, 2007)
      This paper involves the planarization of borophosphosilicate glass (BPSG) film using a new recipe for annealing process to improve the borophosphosilicate glass (BPSG) film flatness after reflow. This improvement is for ...

    • Wettability and surface roughness study on RIE treated aluminium deposited surface 

      Retnasamy, Vithyacharan; Zaliman, Sauli, Dr.; Uda, Hashim, Prof. Dr.; Palianysamy, Moganraj; Aaron, Koay Terr Yeow; Ramzan, Mat Ayub (Trans Tech Publications, 2014-04)
      Design of Experiment (DOE) is a technique for optimizing process which has controllable inputs and measurable outputs. As a method of DOE, 24 Full Factorial design is used to study the effect of Reactive Ion Etch towards ...