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    • MEMS Cantilever beam monitor 

      Muhammad Asyraf Ahmad Zulkifli (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)
      Three cantilever beam monitor has been designed using the same material and dimension. They are the center, left and right cantilever beam with their own contact pad. The center beam can be displaced to the right or left ...