| dc.contributor.author | Anon | |
| dc.date.accessioned | 2010-08-25T04:03:05Z | |
| dc.date.available | 2010-08-25T04:03:05Z | |
| dc.date.issued | 2010-05-11 | |
| dc.identifier.uri | http://dspace.unimap.edu.my/123456789/9099 | |
| dc.description | Dianjurkan oleh Institut Kejuruteraan Nano Elektronik dan Raith Asia Ltd. pada 11 Mei 2010 di Dewan Kuliah DKP1, Pusat Kejuruteraan Kuala Perlis, Universiti Malaysia Perlis. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Universiti Malaysia Perlis (UniMAP) | en_US |
| dc.relation.ispartofseries | 1-Day Intensive Nanolithography Workshop Asia | en_US |
| dc.subject | Electron beam lithogrphy | en_US |
| dc.subject | Lithography technique | en_US |
| dc.subject | E-beam nanolithography | en_US |
| dc.subject | UniMAP -- Activities | en_US |
| dc.subject | UniMAP -- Institut Kejuruteraan Nano Elektronik | en_US |
| dc.title | Electron beam lithography solutions concept | en_US |
| dc.type | Other | en_US |
| dc.publisher.department | Institute of Nano Electronic Engineering | en_US |
