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A very high Q-factor inductor using MEMS technology

dc.contributor.authorKhalid, N.
dc.contributor.authorShah, K.
dc.contributor.authorSingh, J.
dc.contributor.authorLe, H. P.
dc.contributor.authorDevlin, J.
dc.contributor.authorZaliman, Sauli, Lt. Assoc. Prof.
dc.date.accessioned2010-08-02T05:00:10Z
dc.date.available2010-08-02T05:00:10Z
dc.date.issued2010-03-30
dc.identifier.citationProceeding of SPIE, vol. 7646 (1), 2010, p.76461Ien_US
dc.identifier.isbn978-081948061-3
dc.identifier.issn0277-786X
dc.identifier.urihttp://dx.doi.org/10.1117/12.848686
dc.identifier.urihttp://dspace.unimap.edu.my/123456789/8426
dc.descriptionLink to publisher's homepage at http://spiedigitallibrary.aip.org/en_US
dc.language.isoenen_US
dc.publisherSPIEen_US
dc.relation.ispartofseriesProceedings of the Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2010en_US
dc.subjectHigh Quality (Q) factoren_US
dc.subjecthigh radio frequency (RF)en_US
dc.subjectInductoren_US
dc.subjectMicro-electro-mechanical System (MEMS)en_US
dc.subjectQ-factoren_US
dc.titleA very high Q-factor inductor using MEMS technologyen_US
dc.typeWorking Paperen_US


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