A Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering Undergraduate Programme

Thumbnail
View/Open
Date
2005-09-30
Author
Uda, Hashim, Prof. Madya Dr.
Zul Azhar, Zahid Jamal, Prof. Dr.
Nur Hamidah, Abdul Halim
Mohammad Nuzaihan, Md Nor
Metadata
Show full item record
Abstract
To design and build a microelectronic cleanroom which is compatible to other commercially installed clenroom for the purpose of teaching undergraduate and postgraduate students in the field of microelectronic fabrication.
URI
http://dspace.unimap.edu.my/123456789/8416
Collections