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Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices
(Universiti Kebangsaan Malaysia, 2011-11-18)
We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable ...
Polysilicon nanogap fabrication using a thermal oxidation process
(Emerald Group Publishing Limited., 2012)
Purpose - Nanogap electrodes have important applications in power saving devices, electrochemical sensors and dielectric detections of biomolecules. The purpose of this paper is to report on the fabrication and characterization ...