Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Subject "Lithography"
Now showing items 1-2 of 2
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A brief review of the current technologies used for the fabrication of metal-molecule-metal junction electrodes
(Scientific.Net, 2012-12)Fabrication techniques for Metal-molecule-metal junction electrodes suitable to study electron tunneling through metal junctions are reviewed. The applications of current technologies such as mechanical break junction, ... -
Effect of alignment mark depth on alignment signal behavior in advanced lithography
(Universiti Malaysia Perlis, 2008)Finding a robust alignment strategy is one of the key evaluations in defining photolithography process. Alignment is a process to determine how the current pattern is placed on the wafer. Alignment is done by an optical ...