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dc.contributor.authorMohd Zainizan, Sahdan
dc.contributor.authorUda, Hashim
dc.contributor.authorHashim, Saim
dc.contributor.authorMarlia, Morsin
dc.date.accessioned2009-09-03T03:13:10Z
dc.date.available2009-09-03T03:13:10Z
dc.date.issued2005-05-18
dc.identifier.citationp.53-57en_US
dc.identifier.urihttp://dspace.unimap.edu.my/123456789/7133
dc.descriptionOrganized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.en_US
dc.description.abstractIn teaching undergraduates program in MOSFET fabrication, mask set is one of the major problem since the cost is extensively high. The purpose of these masks is to define certain region on a wafer. In this work, a low cost mask set is fabricated with a simple technology. An economical solution of mask sets using transparency films with various channel lengths from 250um to 20 um was produced. Four mask sets of MOSFET were designed using AutoCAD 2002 drawing tools and then printed on the transparency film. Contact printing method was utilized to transfer the mask layouts onto a 4-inch silicon wafer using standard photolithography techniques to check the line uniformity. This task was done in KUKUM Microfabrication Cleanroom. The detail flow of mask making and the resist pattern on the wafer are also presented in this paper. Optical observation shows that the mask layouts were successfully transferred onto photoresist with minimum variation. Our mask sets were really cost effective and practical for teaching undergraduates purposes.en_US
dc.language.isoenen_US
dc.publisherKolej Universiti Kejuruteraan Utara Malaysiaen_US
dc.relation.ispartofseriesProceeding sof the 1st National Conference on Electronic Designen_US
dc.subjectMask fabricationen_US
dc.subjectPattern transferen_US
dc.subjectPhotolithographyen_US
dc.subjectAutoCADen_US
dc.subjectMOSFETen_US
dc.subjectMask -- Design and constructionen_US
dc.titleDesign and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduatesen_US
dc.typeWorking Paperen_US


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