Browsing Ayu Wazira Azhari, Ts. Dr by Author "saleemzaidi@ukm.edu.my"
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Optimization of silver-assisted nano-pillar etching process in silicon
Ayu Wazira, Azhari; Kamaruzzaman, Sopian; Mohd Khairunaz, Mat Desa; Saleem Hussain, Zaidi (Elsevier, 2015-12-01)In this study, a respond surface methodology (RSM) model is developed using three-level Box-Behnken experimental design (BBD) technique. This model is developed to investigate the influence of metal-assisted chemical etching ...