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    Wettability analysis on platinum deposited wafer after reactive ion ecthing using SF6+argon/CF4+argon gaseous 

    Retnasamy, Vithyacharan; Zaliman, Sauli, Dr.; Aaron, Koay Terr Yeow; Goh, Siew Chui; Kamarudin, Hussin, Brig. Jen. Dato' Prof. Dr. (AENSI Publisher All rights reserved, 2013-10)
    Wettability in microfluidic has direct influence to its fluid flow channels. This paper investigates the variable parameters that affect the wetability in terms of contact angle on a Platinum deposited wafer after reactive ...

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    Author
    Aaron, Koay Terr Yeow (1)
    Goh, Siew Chui (1)Kamarudin, Hussin, Brig. Jen. Dato' Prof. Dr. (1)Retnasamy, Vithyacharan (1)Zaliman, Sauli, Dr. (1)Subject
    Contact angle (1)
    DOE (1)
    Platinum (1)RIE (1)Wetability (1)... View MoreDate Issued2013 (1)

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