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Wettability analysis on platinum deposited wafer after reactive ion ecthing using SF6+argon/CF4+argon gaseous

Retnasamy, Vithyacharan; Zaliman, Sauli, Dr.; Aaron, Koay Terr Yeow; Goh, Siew Chui; Kamarudin, Hussin, Brig. Jen. Dato' Prof. Dr. (AENSI Publisher All rights reserved, 2013-10)

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Author
- Aaron, Koay Terr Yeow (1)
- Goh, Siew Chui (1)
- Kamarudin, Hussin, Brig. Jen. Dato' Prof. Dr. (1)
- Retnasamy, Vithyacharan (1)
- Zaliman, Sauli, Dr. (1)
Subject
- Contact angle (1)
- DOE (1)
- Platinum (1)
- RIE (1)
- Wetability (1)
- ... View More
Date Issued
- 2013 (1)