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    Surface roughness scrutinizaton with RIE CF₄+Argon gaseous on platinum deposited wafer 

    Zaliman, Sauli, Dr.; Retnasamy, Vithyacharan; Aaron, Koay Terr Yeow; Siew Chui, Goh; Khairul Anwar, Mohamad Khazali; Nooraihan, Abdullah (Trans Tech Publications, 2014)
    Aluminium metallization has a disadvantage when it comes to high-end applications as it cannot withstand the high temperature and pressure. This paper studies the factors that affect the surface roughness on a Platinum ...

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    Author
    Aaron, Koay Terr Yeow (1)
    Khairul Anwar, Mohamad Khazali (1)Nooraihan, Abdullah (1)Retnasamy, Vithyacharan (1)Siew Chui, Goh (1)... View MoreSubject
    CF₄+Argon (1)
    DOE (1)
    Platinum (1)Reactive Ion Etching (RIE) (1)Surface roughness (1)... View MoreDate Issued2014 (1)

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