Browsing Zaliman Sauli, Lt. Kol. Professor Dr. by Author "Wei Wei, Ng"
Now showing items 1-1 of 1
-
Interaction relationship analysis of surface roughness on aluminium etched wafer using RIE
Zaliman, Sauli, Dr.; Retnasamy, Vithyacharan; Aaron, Koay Terr Yeow; Wei Wei, Ng (Trans Tech Publications, 2014)This paper presents the interaction relationships between Tetrafluoromethane (CF₄) gas, Oxygen (O₂) gas, and RF power in response to the surface roughness of an Aluminium deposited wafer after being etched using Reactive ...