Design and analysis of vibration based MEMS energy harvester for precision agriculture

Abstract

This paper discusses the performances of different cantilever geometry of piezoelectric MEMS Energy Harvester. Resonant frequency, tip deflection, output voltage and peak power response of five different geometries are compared and analysed. Two piezoelectric materials, ZnO and AlN are utilized as part of the cantilever structures. The design and optimization procedures are done using Coventorware®. Meshing refinement study is also carried out to ensure the numerical accuracy of the results and reduce simulation time. The third cantilever design achieved the least resonant frequency, 3.7 kHz and with total peak power response of 0.14 pW.