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Specific contact resistance of ohmic contacts to n-type SiC membranes
(Materials Research Society, 2011-04)
Membranes of epitaxial SiC have been used as a means of eliminating the leakage current into the Si substrate during circular transmission line model (CTLM) measurements. In the n +- 3C-SiC/ Si wafers, the Si substrate was ...
Properties of Al and Pd contacts on n-type SiC membranes
(Materials Research Society, 2012-04)
Membranes with dimensions up to 10 mm x 15 mm have been fabricated in epitaxial 3C-SiC/Si wafers. An array of CTLM metal contacts was deposited onto the upper surface of the n-SiC membrane. Both Al/n-SiC and Pd/n-SiC ...