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Properties of Al and Pd contacts on n-type SiC membranes
(Materials Research Society, 2012-04)
Membranes with dimensions up to 10 mm x 15 mm have been fabricated in epitaxial 3C-SiC/Si wafers. An array of CTLM metal contacts was deposited onto the upper surface of the n-SiC membrane. Both Al/n-SiC and Pd/n-SiC ...