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Specific contact resistance of ohmic contacts to n-type SiC membranes
(Materials Research Society, 2011-04)
Membranes of epitaxial SiC have been used as a means of eliminating the leakage current into the Si substrate during circular transmission line model (CTLM) measurements. In the n +- 3C-SiC/ Si wafers, the Si substrate was ...
Properties of Al and Pd contacts on n-type SiC membranes
(Materials Research Society, 2012-04)
Membranes with dimensions up to 10 mm x 15 mm have been fabricated in epitaxial 3C-SiC/Si wafers. An array of CTLM metal contacts was deposited onto the upper surface of the n-SiC membrane. Both Al/n-SiC and Pd/n-SiC ...
Fabrication of 3C-silicon carbide membranes: Towards development of novel microdevices for biomedical applications
(Institute of Electrical and Electronics Engineers (IEEE), 2012-02-27)
3C-SiC is currently under intense study as a potential material for implantable low power blood pressure sensing due to its biocompatibility. In this work, we present and discuss the fabrication processes for n-type 3C-SiC ...