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Wettability and surface roughness study on RIE treated aluminium deposited surface
(Trans Tech Publications, 2014-04)
Design of Experiment (DOE) is a technique for optimizing process which has controllable inputs and measurable outputs. As a method of DOE, 24 Full Factorial design is used to study the effect of Reactive Ion Etch towards ...
Aluminium surface grain size analysis on RIE treatment
(Trans Tech Publications (TTP), 2013)
Reactive Ion Etch (RIE) has been an important process in the world of microelectronic fabrication. Focus of this preliminary study is on how RIE affects the grain size of aluminum film which is fabricated on substrates. ...