Browsing Conference Papers by Author "Rahmat, Sanudin"
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Design, simulation and characterization of 50nm p-well MOSFET using Sentaurus TCAD Software
Marlia, Morsin; Mohd Khairul Amriey; Abdul Majeed, Zulkipli; Rahmat, Sanudin (Universiti Malaysia Pahang, 2009-06-20)Device 50nm p-well MOSFET was designed, developed and optimized based on 90nm recipe using Sentaurus TCAD Software. In this project, there are two sub-programs used which are Sentaurus Process and Sentaurus Device. Sentaurus ... -
An introduction to optical emission spectroscopy and laser-aided spectroscopy techniques for low-temperature plasma analyses
Nafarizal, Nayan; Rahmat, Sanudin; Tengku Nadzlin, Tengku Ibrahim (Universiti Malaysia Pahang, 2009-06-20)Low-temperature plasma is a tool that has been used widely for surface modification of materials from 70’s. Such as in the microelectronic and semiconductors industries, inductively coupled plasma and capacitively coupled ...