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Nanowire formation for single electron transistor using SEM based Electron Beam Lithography (EBL) technique: Positive tone vs negative tone e-beam resist

Mohammad Nuzaihan, Md Nor; Uda, Hashim; Nur Hamidah, Abdul Halim; Bajuri, S. N M (Nano Science and Technology Institute, 2006)

Experimental studies of nanowires formation are carried out by using Scanning Electron Microscope Based Electron Beam Lithography (EBL) Technique with critical dimensions in less than 100nm. In order to complete the design ...