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Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography
(American Institute of Physics, 2010-03-11)
A reversed spacer patterning technology using a sacrificial layer and a chemical vapor deposition (CVD) spacer layer has been developed, and is demonstrated to achieve sub-50 nm structures with conventional dry etching. ...
Fabrication of silicon nitride ion sensitive field-effect transistor for pH measurement and DNA immobilization/hybridization
(Hindawi Publishing Corporation, 2013)
The fabrication of ion sensitive field-effect transistor (ISFET) using silicon nitride (Si3N4) as the sensing membrane for pH measurement and DNA is reported. For the pH measurement, the Ag/AgCl electrode was used as the ...
Design and fabrication of Nanowire-based conductance biosensor using spacer patterning technique
(Institute of Electrical and Electronics Engineering (IEEE), 2008-12-01)
Materials have different behaviours and properties at the nanoscales (1-100nm). New theories and discoveries have been found in designing and fabricating at these sizes. Silicon Nanowires has allowed the introduction of ...
Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method
(Institute of Electrical and Electronics Engineers (IEEE), 2008-11-04)
The use of Silicon nanowires has allowed the introduction of many new signal transduction technologies in biosensors. The sensitivity and performance of biosensors is being improved by using doping process for their ...
Application of gold nanoparticles for electrochemical DNA biosensor
(Hindawi Publishing Corporation, 2014)
An electrochemical DNA biosensor was successfully fabricated by using (3-aminopropyl)triethoxysilane (APTES) as a linker molecule combined with the gold nanoparticles (GNPs) on thermally oxidized SiOthin films. The SiOthin ...
The usage of max 262 as a programmable low pass filter for nanogap automated permittivity measurement system
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
The Nanogap Automated Permittivity
Measurement System (APMS) are fabricated for
low cost, portable and label free DNA
hybridization detection kit. The nanogap capacitor
can react as a DNA sensor. The difference ...
Design and process development of silicon nanowire based DNA biosensor using electron beam lithography
(Institute of Electrical and Electronics Engineering (IEEE), 2008-12-01)
Silicon nanowires (SiNWs) have their unique feature such as similar diameters to biomolecules, chemically tailorable physical properties, enable to apply in biomolecule detection and can be fabricated as a high performance ...
Nanogap Dielectric Biosensor for label free DNA Hybridization detection
(Universiti Malaysia Perlis, 2007)
Sensors based on nanogap capacitance changes are being developed for genomic and proteomic applications because they offer label-free detection on platforms amenable to high throughput configurations. This paper presents ...