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    Polysilicon nanogap fabrication using a thermal oxidation process 

    Dhahi, T.S; Uda, Hashim, Prof. Dr.; Md. Eaqub, Ali; Nazwa, Taib (Emerald Group Publishing Limited., 2012)
    Purpose - Nanogap electrodes have important applications in power saving devices, electrochemical sensors and dielectric detections of biomolecules. The purpose of this paper is to report on the fabrication and characterization ...

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    AuthorDhahi, T.S (1)Md. Eaqub, Ali (1)Nazwa, Taib (1)Uda, Hashim, Prof. Dr. (1)Subject
    Capacitance (1)
    Electrodes (1)Microelectronics (1)
    Nanogap (1)
    Nanotechnology (1)
    ... View MoreDate Issued
    2012 (1)

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