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Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm

M., Shahiri-Tabarestani; B. A., Ganji; R., Sabbaghi-Nadooshan (Institute of Electrical and Electronics Engineers (IEEE), 2012-02-27)

This paper presents a high sensitive MEMS capacitive pressure sensor for biomedical applications. Two sensor designs incorporating clamped and slotted diaphragm are implemented and compared to realize the pressure-sensitive ...