Browsing The Library by Subject "Zinc Oxide"
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Simulation and characterization of MEMS piezoelectric thermal actuator
(Universiti Malaysia Perlis (UniMAP), 2012-06-18)The development of low cost MEMS devices has been the main focus in recent years. This leads to discovery of MEMS materials and suitable devices. Magnetostatic and electrostatic actuators produce relatively small forces; ...