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    • Fabrication of 3C-silicon carbide membranes: Towards development of novel microdevices for biomedical applications 

      Nashrul Fazli, Mohd Nasir; Charan, M. Shah; Leech, Patrick William; Reeves, Geoffrey K.; Pirogova, Elena; Istivan, Taghrid S; Tanner, Philip G.; Holland, Anthony Stephen (Institute of Electrical and Electronics Engineers (IEEE), 2012-02-27)
      3C-SiC is currently under intense study as a potential material for implantable low power blood pressure sensing due to its biocompatibility. In this work, we present and discuss the fabrication processes for n-type 3C-SiC ...