Browsing The Library by Subject "Substrate bias"
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The effect of pulse DC and DC substrate bias during in situ cleaning PVD process on surface roughness
(Malaysian Technical Universities Network (MTUN), 2012-11-20)Surface morphology modification during in situ cleaning of physical vapor deposition (PVD) process is essential to strengthen and prevent unexpected adhesion failure during machining. Applying pulse direct current (PDC) ...