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Chemical mechanical polishing (CMP) (1)
Critical Ratio (CR) (1)
Cycle time (2)
Days Per Mask Layer (DPML) (1)
Earliest Due Date (EDD) (1)
Fabrication (FAB) (1)
First In First Out (FIFO) (1)
ork in progress (WIP) (1)
Shortest Processing Cycle Time (SPT) (1)
Shortest Remaining Processing Time (SPRT) (1)
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