Browsing Researchers by Subject "Wet etching"
Now showing items 1-2 of 2
-
Fabrication of 3C-silicon carbide membranes: Towards development of novel microdevices for biomedical applications
(Institute of Electrical and Electronics Engineers (IEEE), 2012-02-27)3C-SiC is currently under intense study as a potential material for implantable low power blood pressure sensing due to its biocompatibility. In this work, we present and discuss the fabrication processes for n-type 3C-SiC ... -
Selective growth of ZnO nanorods on microgap electrodes and their applications in UV sensors
(Springer, 2014-01)Selective area growth of ZnO nanorods is accomplished on microgap electrodes (spacing of 6μm) by using a facile wet chemical etching process. The growth of ZnO nanorods on a selected area of microgap electrode is carried ...