Browsing Researchers by Subject "Reactive ion etching"

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    • Aluminium surface grain size analysis on RIE treatment 

      Zaliman, Sauli, Dr.; Retnasamy, Vithyacharan; Fairul Afzal, Ahmad Fuad; Ehkan, Phaklen, Dr.; Palianysamy, Moganraj; Aaron, Koay Terr Yeow (Trans Tech Publications (TTP), 2013)
      Reactive Ion Etch (RIE) has been an important process in the world of microelectronic fabrication. Focus of this preliminary study is on how RIE affects the grain size of aluminum film which is fabricated on substrates. ...

    • Fabrication of 3C-silicon carbide membranes: Towards development of novel microdevices for biomedical applications 

      Nashrul Fazli, Mohd Nasir; Charan, M. Shah; Leech, Patrick William; Reeves, Geoffrey K.; Pirogova, Elena; Istivan, Taghrid S; Tanner, Philip G.; Holland, Anthony Stephen (Institute of Electrical and Electronics Engineers (IEEE), 2012-02-27)
      3C-SiC is currently under intense study as a potential material for implantable low power blood pressure sensing due to its biocompatibility. In this work, we present and discuss the fabrication processes for n-type 3C-SiC ...