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Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization
(Universiti Malaysia Perlis (UniMAP), 2011)
This study demonstrates the process development of silicon nanowires (SiNWs)
sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. Prior to actual fabrication process, ...
Fabrication of Silicon Nanowires using Scanning Electron Microscope based Electron Beam Lithography method
(Universiti Malaysia Perlis, 2007)
Nanowires is a new class of materials that have attracted attention and great research interest in the last few years because of their potential applications in nanotechnology such as nanoelectronic, nanomechanical and ...
Fabrication and characterization of silicon based vertical electrode nanogap biosensor for protein detection
(Universiti Malaysia Perlis, 2009)
The nanogap biosensor is a new class of device that has attracted attention and great interest among the researchers due to their potential applications in nanotechnology. This nanogap device which are fabricated using ...
Preparation and characterization of bulk nanoporous Sn, SnO2 AND Zn
(Universiti Malaysia Perlis (UniMAP), 2013)
Extreme ultraviolet lithography (EUVL) has garnered much attention due to its potential in high-volume manufacturing (HVM) of integrated circuit (IC). This research contributes to the study of EUV source target. It has ...