Browsing Theses & Dissertations by Author "Mukhzeer, Mohammad Shahimin, Dr."
Now showing items 1-1 of 1
-
Optimization of line pattern transfer of integrated optical mach-zender interferometer for optical sensor
Nurulbariah, IdrisConventional photolithography usually used in in-house fabrication process to transfer the design of line pattern. This research lays the foundation for the optimization of photo lithography process for line pattern transfer ...